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Magnetically Levitated Turbomolecular Vacuum Pump Low Vibration CXF-320/3000E

Categories Turbomolecular Pump
Brand Name: KYKY
Model Number: CXF-320/3000E
Certification: CE
Place of Origin: China
MOQ: 1
Payment Terms: T/T, L/C
Delivery Time: 4weeks
Packaging Details: Wooden box for overseas shipment
Pumping Speed: 3000L/s N2
Controller: external
Flange: ISO-F
Cooling: water
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Magnetically Levitated Turbomolecular Vacuum Pump Low Vibration CXF-320/3000E

Maglev Pump , CXF-320/3000E , Waterr cooling , ISO-F , External controller

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.


The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.


The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

6. Free of friction

7. Free of pollution

8. Free of maintenance

9. Low vibration

10. installed in any orientation.


Technologies:

  • Control Technology for Magnetic Bearing: 5-axis magnetically levitated. This design can have dynamic response and timely adjustment by means of dynamic active closed-circuit magnetic suspension control technology based on advanced international control theory, so as to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
  • Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system are applied to series magnetically levitated pumps, so to have maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
  • Carbon fiber composite rotor technology: The turbo rotors of serial magnetic suspension molecular pumps are made by compounding high-strength aluminum alloy and light-weight carbon fiber. In comparison with all aluminum alloy rotors, the turbo rotors are characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
  • Corrosion resisting technology: Surfaces of parts in chambers of serial magnetic suspension molecular pumps are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, such inert gases as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
  • Heating temperature control system: Series magnetically levitated molecular pumps are equipped with an electric heater and a temperature controller, so that cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.

Specifications:

Flange(In)DN250 ISO-F
Flange(Out) KFDN50
Pumping Speed( L/s)N2:3000
Ar:2750
He:2300
H2:1100
Compression RatioN2:108
Ar:108
He:104
H2:103
Ultimated Pressure(Pa)CF:1×10-6
ISO-K/F:6×10-6
Max. Continuous Fore-vacuum pressure(Pa)40
Max. Fore-vacuum PressureN2:290
Gas Throughout (sccm)N2:5800
Ar:2200
He:4300
H2:3100
Rotation Speed ( rpm)21000
Run-Up Time(min)≤18
Cooling Type,StandardWater
Cooling Water Consumption ( L/min)1
Cooling Water Temperature(℃)20
Power Connection:Voltage (V AC)220
Controller ModelCXF-3000
Weight (kgs)70

Applications:

Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.

Quality Magnetically Levitated Turbomolecular Vacuum Pump Low Vibration CXF-320/3000E for sale
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