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ChemSource 250

Country/Region china
Company Precision Flow Technologies Co.,Ltd
Categories Dispensing Pressure Vessel
Telephone (845) 247-0810, (845) 383-1964, (970) 221-9801
ICP License Issued by the Chinese Ministry
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ChemSource 250

ChemSource Delivery Systems are high-purity chemical delivery systems designed especially for use in CVD applications.

The ChemSource 250 is a fully automated, dual canister, pressure dispense system. Capable of housing pressure vessels up to 38 liters, the ChemSource 250 can deliver CVD chemicals to up to 3 separate points of use.

System Features:

  • Fully automated, available with network communications
  • Color touch screen GUI
  • Rugged welded steel cabinet construction
  • Adjustable height shelf
  • Analog scale measures vessel weight
  • All UHP 316L 1/4" stainless steel plumbing
  • On-board facilities gas panel
  • Zero dead leg 5-valve process panel
  • Up to three valved outlets
  • All facilities connections located on top of cabinet

Safety Features:

  • 110% spill containment
  • Local and remote EGO
  • Audible alarm
  • Color-coded display of Warnings and Alarms
  • Door interlock alarm
  • Low and high liquid level alarms
  • Low and high pressure alarms
  • Over-pressure safety relief
  • Optional sprinkler head
  • Optional gas detection
  • Bolt-down mounting of cabinet

Standard Functions:

  • Online - Actively delivering chemical
  • Ready - Waiting for "call for chemical"
  • Offline - Not available for "call for chemical"
  • Automated vessel change-out procedure with user prompts
  • Pump/Purge to Point of Use

System Specifications:

  • Cabinet Dimensions - 23.1" W x 20" W x 69.5" H
  • Plumbing - 316L S/S, 1/4" welded with VCR connections for HP or UHP service
  • Vessel sizes - 4 to 38 liters - supplied by customer
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