ChemSource 250

ChemSource Delivery Systems are high-purity chemical delivery systems designed especially for use in CVD applications.

The ChemSource 250 is a fully automated, dual canister, pressure dispense system. Capable of housing pressure vessels up to 38 liters, the ChemSource 250 can deliver CVD chemicals to up to 3 separate points of use.

System Features:

• Fully automated, available with network communications
• Color touch screen GUI
• Rugged welded steel cabinet construction
• Adjustable height shelf
• Analog scale measures vessel weight
• All UHP 316L 1/4" stainless steel plumbing
• On-board facilities gas panel
• Zero dead leg 5-valve process panel
• Up to three valved outlets
• All facilities connections located on top of cabinet

Safety Features:

• 110% spill containment
• Local and remote EGO
• Audible alarm
• Color-coded display of Warnings and Alarms
• Door interlock alarm
• Low and high liquid level alarms
• Low and high pressure alarms
• Over-pressure safety relief
• Optional sprinkler head
• Optional gas detection
• Bolt-down mounting of cabinet

Standard Functions:

• Online - Actively delivering chemical
• Ready - Waiting for "call for chemical"
• Offline - Not available for "call for chemical"
• Automated vessel change-out procedure with user prompts
• Pump/Purge to Point of Use

System Specifications:

• Cabinet Dimensions - 23.1" W x 20" W x 69.5" H
• Plumbing - 316L S/S, 1/4" welded with VCR connections for HP or UHP service
• Vessel sizes - 4 to 38 liters - supplied by customer